A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure
نویسندگان
چکیده
منابع مشابه
A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure
A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheri...
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ژورنال
عنوان ژورنال: Sensors
سال: 2013
ISSN: 1424-8220
DOI: 10.3390/s131217006